TechniStrip P1331 - 5.00 l - MOS
Available, ready for dispatch in approx.: 3-4 Tage
TechniStrip® P1331
High Performance Remover
General Information
TechniStrip® P1331 is a remover with very strong stripping power for Novolak-based resists (including all AZ® positive resists), epoxy-based coatings, polyimides and dry films. At a typical application temperatures around 75°C TechniStrip® P1331 may dissolve cross-linked resists without residue also, e.g. through dry etching or ion implantation. The remover can also be used in spraying processes.
TechniStrip® P1331 is, for alkaline sensitive materials, an alternative to the P1316.
Product Properties
- Flashpoint: 100,5°C
- Viscosity (20°C): < 2 cP
- Water Solubility: Totally miscible
- Boiling point: 189°C
- Density (at 20°C): 1.109 g/cm3
Compatibility
- Metals: attacked Al, Cu, Au
- Metals: no attack on Ta, Ni, Ti, TiN
- Substrates: Si, SiO2
Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.
Main Features
- Very high stripping rate, >10µm/min
- Great resin dissolution efficiency
- Enhanced resin loading capacity, > 2 times to standard POR
- THB121N, 21µm, 8” wafer- up to 15 wafers/liter
- Bath life up to 72 hours @ 70°C
- Total metal compatibility, <10A/min @60°C
- Complete water miscibility
- Safety: labeled irritant
Some Applications
TechniStrip® P1316 is a powerful NMP-free remover for:
- Novolak-based positive resists such as all positive AZ® resists
- Epoxy-based resists
- Polyimides, bonding glues
- Dry films
Further Information
MSDS:
Safety Data Sheet TechniStrip P1331 (MOS) english
Sicherheitsdatenblatt TechniStrip P1331 (MOS) german
TDS:
Technical Data Sheet TechniStrip P1331 (MOS) english
Specs:
Specs TechniStrip P1331 (MOS)
Application Notes:
Photoresist Removal english
Fotolack entfernen german
| Bottle size: | 5.00 l |
|---|---|
| Compatible Substrates: | Si, SiO2 |
| Purity: | MOS |
| Selectivity (attacked): | Al, Au, Cu |
| Selectivity (no attack on): | Ni, Ta, Ti, TiN |
Related products
