TECHNIC France

TechniStrip P1316 - 5.00 l - MOS

TechniStrip® P1316 is a remover with very strong stripping power for Novolak-based resists, epoxy-based coatings, polyimides and dry films.
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Product number: TP1316M5
Manufacturer: TECHNIC France
Product information "TechniStrip P1316 - 5.00 l - MOS"

TechniStrip® P1316

High Performance Remover

 

General Information

TechniStrip® P1316 is a remover with very strong stripping power for Novolak-based resists (including all AZ® positive resists), epoxy-based coatings, polyimides and dry films. At a typical application temperatures around 75°C TechniStrip® P1316 may dissolve cross-linked resists without residue also, e.g. through dry etching or ion implantation. The remover can also be used in spraying processes.

Product Properties
  • Flashpoint: 93°C
  • Viscosity (20°C): < 2 cP
  • Water Solubility: Totally miscible
  • Boiling point: 189°C
  • Density (at 20°C): 1.03 g/cm3
Compatibility
  • Metals: attacked Al, Cu, Au
  • Metals: no attack on Ta, Ni, Ti, TiN
  • Substrates: Si, SiO2

Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.

Some Applications

TechniStrip® P1316 is a powerful NMP-free remover for:

  • Novolak-based positive resists such as all positive AZ® resists
  • Epoxy-based resists
  • Polyimides, bonding glues
  • Dry films
Further Information

MSDS:
Safety Data Sheet TechniStrip P1316 (MOS) english
Sicherheitsdatenblatt TechniStrip P1316 (MOS) german

TDS:
Technical Data Sheet TechniStrip P1316 (MOS) english

Specs:
Specs TechniStrip P1316 (MOS)

Application Notes:
Photoresist Removal english
Fotolack entfernen german

Further Information about Processing

Bottle size: 5.00 l
Compatible Substrates: Si, SiO2
Purity: MOS
Selectivity (attacked): Al, Au, Cu
Selectivity (no attack on): Ni, Ta, Ti, TiN