TECHNIC France

TechniStrip NF52 - 5.00 l - MOS

TechniStrip™ NF52 is a highly effective negative tone photoresist remover used mainly for TSV mask and solder bumping applications.
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Product number: TPNF5250
Manufacturer: TECHNIC France
Product information "TechniStrip NF52 - 5.00 l - MOS"

TechniStrip NF52

Highly Effective Remover

 

General Information

TechniStrip NF52 is a highly effective remover for negative resists (liquid resists as well as dry films). The intrinsic nature of the additives and solvent make the blend totally compatible with metals used throughout the BEOL interconnects to WLP bumping applications.

Product Properties
  • Flashpoint: 90°C
  • Viscosity (20°C): < 2cP
  • Water Solubility: Totally miscible
  • Boiling point: 189°C
  • Density (at 20°C): 1.08 g/cm3
Compatibility
  • Metals: no attack on Al, Cu, Ni, Ta, TaN, Ti, TiN, TiW, Ag, Sn
  • Substrates: Si, SiO2

Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.

Main Features
  • Very high stripping rate, >10µm/min
  • Great resin dissolution efficiency of dry film
  • Bath life up to 72 hours @ 70°C
  • Total metal compatibility, <2A/min @60°C
  • Complete water miscibility
Further Information

MSDS:
Safety Data Sheet TechniStrip NF52 (MOS) english
Sicherheitsdatenblatt TechniStrip NF52 (MOS) german

TDS:
Technical Data Sheet TechniStrip NF52 (MOS) english

Specs:
Specs TechniStrip NF52 (MOS)

Application Notes:
Photoresist Removal english
Fotolack entfernen german

Further Information about Processing

Compatible Substrates: Si, SiO2
Purity: MOS
Selectivity (no attack on): Ag, Al, Cu, Ni, Sn, Ta, TaN, Ti, TiN, TiW