TECHNIC France

TechniStrip Micro D2 - 5.00 l - VLSI

TechniStrip® Micro D2 is a versatile stripper which is dedicated to address resin lift off and dissolution on negative and positive tone resist.
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Product number: TPD2V500
Manufacturer: TECHNIC France
Product information "TechniStrip Micro D2 - 5.00 l - VLSI"

TechniStrip® Micro D2

Remover with high metal and material compatibility

 

General Information

TechniStrip® Micro D2 is a versatile stripper which is dedicated to address resin lift off and dissolution on negative and positive tone resist. The organic mixture has the particularity to offer high metal and material compatibility allowing to be used on all stacks and particularly on sensitive substrates.
TechniStrip® Micro D2 is a very well suited substitute for the NMP and DMSO/Amine strippers, that are regarded as toxic since a while, or which are corrosive to some metals.

Product Properties
  • Flashpoint: 87°C
  • Water Solubility: Fully miscible
  • Boiling point: 190°C
  • Density (at 20°C): 1.113 g/cm3
Compatibility
  • Metals: no attack on Al, Cu, Ni, Ta, TaN, Ti, TiN, TiW, Au, Ag, Sn
  • Substrates: SiO2, Si

Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.

Some Applications
  • Positive resin stripping
  • Negative tone resist lift off
  • Lift off process to pattern metals and dielectric layers
  • Reworking
  • Adhesive, glue cleaner
Further Information

MSDS:
Safety Data TechniStrip Micro D2 (VLSI) english
Sicherheitsdatenblatt TechniStrip Micro D2 (VLSI) german

TDS:
Technical Data Sheet TechniStrip Micro D2 (VLSI) english

Specs:
Specs TechniStrip Micro D2 (VLSI)

Application Notes:
Photoresist Removal english
Fotolack entfernen german

Further Information about Processing

Bottle size: 5.00 l
Compatible Substrates: Si, SiO2
Purity: VLSI
Selectivity (no attack on): Ag, Al, Au, Cu, Ni, Sn, Ta, TaN, Ti, TiN, TiW