TechniEtch Cr01 - 2.50 l - VLSI
TechniEtch Cr01
Chromium Etchant
General Information
TechniEtch Cr01 is a ready-to-use etching mixture based on ceric ammonium nitrate and perchloric acid for Cr etching. TechniEtch Cr01 consists of ceric ammonium nitrate : Perchloric acid : water = 10.9% : 4.25% : 84.85% with an etching rate of about 60 nm/minute at room temperature comes in VLSI quality.
Product Properties
- Cr etch rate at room temperature 60-100 nm/min
- Al, Ti, W, Ni @ RT from 10nm/min to 200 nm/min
- Cu, Ag, V are heavily etched > 200 nm/min
- Au, Pd, Pt are compatible
- Compatible with positive tone resin
- Can be diluted down to adjust Cr etch rate
Selectivity
TechniEtch Cr01 is compatible/etches selective to following materials:
- Metals: no attack on Au, Pd, Pt
- Metals: attack on Cr, Fe, Mo, Ni, Al, Ti, W, Cu, Ag, V, Co, Mg, Mn, Sn
Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.
Further Information
MSDS:
Safety Data TechniEtch Cr01 (VLSI) english
Sicherheitsdatenblatt TechniEtch Cr01 (VLSI) german
TDS:
Technical Data Sheet TechniEtch Cr01 (VLSI) english
Specs:
Specs TechniEtch Cr01 (VLSI)
Application Notes:
Wet Etching english
Nasschemisches Ätzen german
Wet Etching Metals english
Nasschemisches Ätzen von Metallen german
| Bottle size: | 2.50 l |
|---|---|
| Purity: | VLSI |
| Selectivity (attacked): | Ag, Al, Co, Cr, Cu, Fe, Mg, Mn, Mo, Ni, Sn, Ti, V, W |
| Selectivity (no attack on): | Au, Pd, Pt |
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