TechniEtch ACI2 - 5.00 l - VLSI
TechniEtch™ACI2
Gold Etchant
General Information
TechniEtch™ACI2 is a highly effective and selective gold stripper. TechniEtch™ACI2 is an Iodine based Gold etchant, containing particular additives that greatly enhance stability and metal loading capability compared to conventional I2/I3 - based solutions .
Product Properties
- High etch rate at room temperature
- Low surface tension for enhanced wetting property
- High stability even in presence of metal contamination (Cu, Ni…).
- Loading & bath life independent of the solution Cu contamination level (up to 1g/l)
- Enlarged loading capacity compared to standard I2/KI based solutions.
- Better process controllability/reliability.
- Low Toxicity compared to cyanide and HF/HNO3 based solutions
Selectivity
TechniEtch™ACI2 is compatible/etches selective to following materials:
- Metals: no attack on Ni, Al, Ti, TiN
- Metals: attack on Au, Cu, Sn, Pt, W
- Semiconductor materials: Si, SiO2, Si3N4
Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.
Further Information
MSDS:
Safety Data TechniEtch™ACI2 (VLSI) english
Sicherheitsdatenblatt TechniEtch™ACI2 (VLSI) german
TDS:
Technical Data Sheet TechniEtch™ACI2 (VLSI) english
Specs:
Specs TechniEtch™ACI2 (VLSI)
Application Notes:
Wet Etching english
Nasschemisches Ätzen german
Wet Etching Metals english
Nasschemisches Ätzen von Metallen german
| Purity: | VLSI |
|---|---|
| Selectivity (attacked): | Au, Cu, Pt, Sn, W |
| Selectivity (no attack on): | Al, Ni, Ti, TiN |
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