TechniEtch ACI2 - 5.00 l - VLSI

TECHNIC France

TechniEtch™ACI2 is a potassium iodide and iodine-based etching mixture for gold etching.

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1.00 l

5.00 l

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Product number: TEACI2V5

Manufacturer: TECHNIC France

Product information "TechniEtch ACI2 - 5.00 l - VLSI"

TechniEtch^™ACI2

Gold Etchant

General Information

TechniEtch^™ACI2 is a highly effective and selective gold stripper. TechniEtch^™ACI2 is an Iodine based Gold etchant, containing particular additives that greatly enhance stability and metal loading capability compared to conventional I2/I3 - based solutions .

Product Properties

High etch rate at room temperature
Low surface tension for enhanced wetting property
High stability even in presence of metal contamination (Cu, Ni…).
Loading & bath life independent of the solution Cu contamination level (up to 1g/l)
Enlarged loading capacity compared to standard I2/KI based solutions.
Better process controllability/reliability.
Low Toxicity compared to cyanide and HF/HNO3 based solutions

Selectivity

TechniEtch^™ACI2 is compatible/etches selective to following materials:

Metals: no attack on Ni, Al, Ti, TiN
Metals: attack on Au, Cu, Sn, Pt, W
Semiconductor materials: Si, SiO2, Si3N4

Data on selectivity and compatibility are manufacturer information and do not claim to be complete. Please contact us for further details.

Further Information

MSDS:
Safety Data TechniEtch^™ACI2 (VLSI) english
Sicherheitsdatenblatt TechniEtch^™ACI2 (VLSI) german

TDS:
Technical Data Sheet TechniEtch^™ACI2 (VLSI) english

Specs:
Specs TechniEtch^™ACI2 (VLSI)

Application Notes:
Wet Etching english
Nasschemisches Ätzen german
Wet Etching Metals english
Nasschemisches Ätzen von Metallen german

Further Information about Processing

Purity:	VLSI
Selectivity (attacked):	Au, Cu, Pt, Sn, W
Selectivity (no attack on):	Al, Ni, Ti, TiN

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