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AZ P4K-AP Coating - 3.785L
10P4KAP
Bottle size:
3.785 l
AZ® P4K-AP
Protective Coating
General Information
AZ® P4K-AP is a cost-effective coating for the protection of device surfaces during operations such as back-lap or backside etch. It is based on Novolak resin and is resistant to most etchants. The thickness of this coating is 6.8 µm at 4000 rpm spin speed.
Please note, that the protective coating AZ® P4K-AP is not stable in KOH-etches typically used for silicon etching.
Product Properties
AZ® P4K-AP is a blend of resin and solvent components typical of fully formulated photoresists. The AZ® P4K-AP Protective Coating excludes the photoactive component of a fully formulated photoresist, thus removing material and QA related costs for applications where photolithographic performance in unnecessary.
AZ® P4K-AP uses the same base materials as the industry standard AZ® P4620 photoresist. It offers:
Superior adhesion to a wide variety of substrates
Compatible with many wet chemistries, both etch and plating
Good coating properties
Standard photoresist coating processes are used
The AZ® P4K-AP can be used in:
Dry etch processes
Wet etch processes
Plating processes
The AZ® P4K-AP is removed/stripped in standard wet or dry photoresist removal processes.
Developers
AZ® P4K-AP is not a photoresist, therefore there is no developer required.
Removers
AZ® P4K-AP can be removed with all common photoresist strippers such as: Acetone, alkaline solutions, AZ® 100 Remover, DMSO, AZ® 920 Remover and TechniStrip P1316.
Thinning/ Edge Bead Removal
We recommend for thinning and edge bead removal PGMEA and AZ® EBR Solvent.
Further Information
MSDS:
Safety Data Sheet AZ® P4K-AP Photoresist english
Sicherheitsdatenblatt AZ® P4K-AP Fotolack german
TDS:
Technical Data Sheet AZ® P4K-AP Photoresist english
Application Notes:
Further Information about Photoresist Processing