Merck Performance Materials GmbH

PL 177 Photoresist - 3.785 l

AZ® PL177 is a general purpose positive resist, dyed with a blue/violet color.
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Product number: 1A000177
Manufacturer: Merck Performance Materials GmbH
Product information "PL 177 Photoresist - 3.785 l"

AZ® PL 177

Positive Thick Resist

 

General Information

AZ® PL 177 is a positive tone liquid photoresist for the application in various coating techniques, especially for printed circuit boards manufacturing. AZ® PL 177 is dyed with a blue/violet colour for easy inspection after coating. It can be used for spin coating as well as for dip coating or for spray- or roller-coating. It is especially suited for wet chemical etching due to its outstanding adhesion properties and chemical stability. It is a general purpose resist and fits to all applications where high resolution and high thermal stability are not important. The AZ® PL 177 is a more inexpensive resist for lower demands regarding resolution and sidewall steepness. With a resist film thickness of approx. 5 µm at 4000 rpm, a resolution of approx. 4 - 5 µm is possible.

Product Properties
  • Good drying behaviour
  • Aqueous-alkaline process ability
  • PGMEA based formulation
  • Very good adhesion properties to many types of substrates
  • Blue/violet coloured for easy inspection
  • Compatible with all common strippers (e.g. with AZ® 100 Remover, organic solvents, or aqueous alkaline)
  • g-, h- and i-line sensitive (approx. 320 - 440 nm)
  • Resist film thickness range approx. 4 - 8 µm
Developers

As a developer, we recommend the NaOH-based AZ® 351B, the KOH-based AZ® 400K or TMAH-based devel¬oper such as the AZ® 2026 MIF. AZ Developer and even simple aqueous KOH or NaOH solutions can be used.

Removers

For non cross-linked resist films the AZ® 100 Remover, DMSO or other common organic solvents can be used as stripper. If the resist film is cross-linked (e.g. by high temperature steps > 140°C, during plasma processes, such as dry etching, or during ion implantation), we recommend the NMP-free TechniStrip P1316 as remover. AZ® 920 Remover can be a good choice as well in case of harsh treated or hard to remove resist residuals.

Thinning/ Edge Bead Removal

We recommend for thinning and edge bead removal AZ® EBR Solvent, PGMEA or MEK. AZ® EBR 70/30 Solvent is possible as well for edge bead removal.

Further Information

MSDS:
Safety Data Sheet AZ® PL177 Photoresist english
Sicherheitsdatenblatt AZ® PL177 Fotolack german

TDS:
Technical Data Sheet AZ® PL177 Photoresist english

Application Notes:
Further Information about Photoresist Processing

Chemically amplified: no
Film thickness: 4.0 – 8.0 µm
Film thickness range: medium (1.6 - 5.0µm), thick (> 5.1µm)
High thermal stability: no
Mode: positive
Optimized for: electroplating, p. circuit board, wet etching