Book "Photolithography- Basics of Microstructuring"
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Photolithography- Basics of Microstructuring
Book German Version
With this book, we would like to give you comprehensive, application-oriented know-how on wafers, photo chemicals and the structuring steps carried out with these. Theoretical basics are dealt with only to the extent as they are helpful for the understanding of the relationships between the process parameters. This keeps the focus on the description and explanation of practical examples.
We unfortunately cannot (always) give you ready-to-use recipes with guaranteed success on the way into the clean room. Rather, in the following chapters, our main objective is to provide you with all the necessary understanding for the planning, realization and optimization of your lithographic processes in all sub-steps with a minimum of time.
If you are interested in our book, please add it to your order or just fill in the form.
Our book is only available as a printed version. You can download some chapters as application notes.
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