AZ P4903 Photoresist - 3.785 l

AZ^® P4903

Positive Thick Resist - AZ^® P4110, AZ^® P4330, AZ^® P4903, AZ^® P4620

General Information

The AZ^® P4000 positive resist series with its members AZ^® P4110, AZ^® P4330, AZ^® P4620 and AZ^® P4903 have two main characteristics: An improved adhesion to all common substrates for a higher stability for e.g. wet etching or plating and a lower photo active compound concentration, which allows the application of thick and very thick resist films (approx. 1 - 30 µm). This resist series have a medium thermal stability and can be developed with common KOH or TMAH based developers.

Product Properties

• Optimized resist adhesion to all common substrate materials
• Broad process parameter window for stable and reproducible litho-processes
• Compatible with all common developers (KOH- or TMAH-based)
• Compatible with all common strippers (e.g. with AZ^® 100 Remover, organic solvents or aqueous alkaline)
• g-, h- and i-line sensitive (approx. 320 - 440 nm)
• Resist film thickness range approx. 10 - 35 µm

Developers

If metal ion containing developers can be used the KOH-based AZ^® 400K in a 1:4 dilution or the finish diluted version AZ^® 400K 1:4 (for higher resist film thicknesses 1:3.5 - 1:3 diluted possible) is a suited developer. If metal ion free developers have to be used, we recommend the TMAH-based AZ^® 2026 MIF developer (undiluted).

Removers

For non cross-linked resist films the AZ^® 100 Remover, DMSO or other common organic solvents can be used as stripper. If the resist film is cross-linked (e.g. by high temperature steps > 140°C, during plasma processes, such as dry etching, or during ion implantation), we recommend the NMP-free TechniStrip P1316 as remover. AZ^® 920 Remover can be a good choice as well in case of harsh treated or hard to remove resist residuals.

Thinning/ Edge Bead Removal

We recommend for thinning and edge bead removal AZ^® EBR Solvent or PGMEA. AZ^® EBR70/30 Solvent is possible as well for edge bead removal.

Further Information

MSDS:
Safety Data Sheet AZ^® P4903 Photoresist english
Sicherheitsdatenblatt AZ^® P4903 Fotolack german

TDS:
Technical Data Sheet AZ^® P4000 Series english
Information AZ^® P400 Series english

Application Notes:
Further Information about Photoresist Processing