Merck Performance Materials GmbH
AZ EBR Solvent - 5.00 l
AZ® EBR Solvent is the main solvent of almost all our photoresists and can be used for dilution and edge bead removal.
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Product number:
1000002
Manufacturer:
Merck Performance Materials GmbH
Product information "AZ EBR Solvent - 5.00 l"
AZ® EBR Solvent
1-methoxy-2-propyl-acetate
General Information
AZ® EBR Solvent is the main solvent/thinner of almost all AZ® and TI photoresists due to its low vapour pressure and its suppression of particle formation in the (further diluted) resist. Additionally, PGMEA is often used for edge bead removal, since its low vapour pressure prevents further thinning of the coated resist film.
Product Properties
- Density: 0.97 g/cm3
- Melting point: -66°C
- Boiling point: 125°C
- Flash point: 45°C
- Vapour pressure @ 20°C: 5 hPa
PGMEA Molecule
Further Information
MSDS:
Safety Data Sheet AZ® EBR Solvent english
Sicherheitsdatenblatt AZ® EBR Solvent german
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