Merck Performance Materials GmbH
AZ EBR 70/30 - 5.00 l
AZ® EBR Solvent 70/30 is the main solvent of almost all our photoresists and can be used for dilution and edge bead removal.
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Product number:
1070302
Manufacturer:
Merck Performance Materials GmbH
Product information "AZ EBR 70/30 - 5.00 l"
AZ® EBR Solvent 70/30
1-methoxy-2-propyl-acetate
General Information
AZ® EBR Solvent 70/30 is the main solvent/thinner of almost all AZ® and TI photoresists due to its low vapour pressure and its suppression of particle formation in the (further diluted) resist. Additionally, PGMEA is often used for edge bead removal, since its low vapour pressure prevents further thinning of the coated resist film.
Product Properties
- Density: 0.97 g/cm3
- Melting point: -66°C
- Boiling point: 125°C
- Flash point: 45°C
- Vapour pressure @ 20°C: 5 hPa
PGMEA Molecule
Further Information
MSDS:
Safety Data Sheet AZ® EBR Solvent 70/30 english
Sicherheitsdatenblatt AZ® EBR Solvent 70/30 german
TDS:
Technical Data Sheet AZ® EBR Solvent 70/30 english
Information AZ® EBR Solvent 70/30 english
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