AZ 351 B Developer - 5.00 l

Merck Performance Materials GmbH

AZ® 351B Developer is a buffered, NaOH based developer concentrate for many positive and image reversal resists.

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Product number: 1000351

Manufacturer: Merck Performance Materials GmbH

Product information "AZ 351 B Developer - 5.00 l"

AZ^® 351B Developer

Inorganic Developers

General Information

AZ^® 351B Developer is a boric acid buffered, NaOH-based developer for non-chemically amplified positive resists.

Product Features

AZ^® 351B Developer is a NaOH-based developer, particularly suitable for developing non-chemically amplified positive resists with layer thicknesses of a few µm. AZ^® 351B Developer comes as a concentrate and is usually diluted 1: 4 with water. To increase selectivity, a 1: 5 - 1:6 dilution can also be applied, but this significantly reduces the development rate and is therefore not a reasonable option for thicker resist films. If the requirements for steep resist sidewalls are low, the AZ^® 351B can also be set stronger (1:3.5 - 1:3) if higher development rates are required , but this leads to a disproportionate increase in dark erosion. AZ^® 351B is less suitable for negative resists or chemically amplified positive resists; TMAH-based developers such as the AZ^® 326 MIF, AZ^® 726 MIF or AZ^® 2026 MIF are recommended here. AZ^® 351B attacks aluminum with an etching rate of - depending on the concentration of the developer dilution - several 10 nm/min to over 100 nm/min. If this cannot be tolerated, the Al-compatible AZ^® Developer can be an alternative.

Further Information

Our safety data sheets and some of our technical data sheets are password-protected.
You will receive the access data after completing the form.
The access data for the data sheets are not your login data from our shop!

MSDS:
Safety Data Sheet AZ^® 351B Developer english
Safety Data Sheet AZ^® 351B Entwickler german

TDS:
Technical Data Sheet AZ^® 351B Developer english

Application Notes:
Development of Photoresist english
Development of Photoresist german

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